Title:
HIGH ENERGY LARGE CURRENT PARTICLE SOURCE
Document Type and Number:
Japanese Patent JPS6417361
Kind Code:
A
Abstract:
PURPOSE: To provide a particle source with high energy and a large current which has a high peak value, favorable for generating polyvalent ions by specifying gas to be enclosed between a first and second electrodes arranged symmetric coaxially but asymmetrically in the axial direction. CONSTITUTION: Discharge tube electrodes 1, 2 are formed symmetrically coaxially but asymmetrically in the axial direction. One electrode 1 either has no hole or if made a 10mm or less diameter hole, at the center, and the other electrode 2 has a 40mm or more diameter hole at the center. The polarity of the electrode 1 with no hole is negative, when an electron beam is obtained and positive, when an ion beam is obtained. Element with an atomic number larger than boron is used for gas to be enclosed at a pressure of 2Torr or less. A discharge current is 100kA or more, and a time required to reach 100kA is 1μS or less. An electric field lens 7 or a magnetic field lens is combined therewith to envelop shrinkage plasma as a whole. In this way, electron flux or multivalent ion flux with high energy and a large current is obtained highly efficiently for easier accelerating than the univalent ions.
Inventors:
WATANABE YOSHIO
OCHIAI ISAO
HANSU PIITAA SUTOOMUBERUGU
OCHIAI ISAO
HANSU PIITAA SUTOOMUBERUGU
Application Number:
JP17095787A
Publication Date:
January 20, 1989
Filing Date:
July 10, 1987
Export Citation:
Assignee:
HITACHI LTD
PHILIPS NV
PHILIPS NV
International Classes:
H01J37/08; H01J27/02; H01J37/077; H05H1/24; (IPC1-7): H01J27/02; H01J37/077; H01J37/08
Attorney, Agent or Firm:
Katsuo Ogawa