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Title:
高流量マイクロバルブ
Document Type and Number:
Japanese Patent JP2007509286
Kind Code:
A
Abstract:
A method for achieving high flow in valves with small actuation distance is described. A detailed description for a silicon microvalve is provided. An algorithm is described for designing optimized valves.

Inventors:
Henning, Albert, Kay.
Celser, Michael
Kozad, Bradford, A.
Application Number:
JP2006534087A
Publication Date:
April 12, 2007
Filing Date:
September 29, 2004
Export Citation:
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Assignee:
SMC Corporation
International Classes:
F16K7/12; B81B3/00; F15C5/00; F16K1/42; F16K11/04; F16K99/00; F16K
Domestic Patent References:
JP2003156157A2003-05-30
JPS62146057U1987-09-14
Foreign References:
US3792720A1974-02-19
US6412751B12002-07-02
Attorney, Agent or Firm:
Takehiro Chiba



 
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