To provide the method for producing the high frequency circuit element consisting of lamination of a board made of a microwave magnetic material and a hard magnetic board through simultaneous baking.
A calcium vanadium iron is selected for a microwave magnetic material and a strontium iron is selected as a hard magnetic material with nearly equal sintering temperatures, and a high frequency circuit element 10 is configured with a shield film 4 made of a palladium or platinum between the boards 1a, 1b made of the microwave magnetic materials and the hard magnetic board 3. Since diffusion of strontium ions from the hard magnetic board 3 to the boards 1a, 1b made of the microwave magnetic material with the shield film 4, the high frequency circuit element 10 consisting of the lamination of the hard magnetic board 3 and the boards 1a, 1b made of the microwave magnetic material is baked simultaneously. Thus, the high frequency circuit element 10 consisting of the microwave magnetic material and the hard magnetic material acting like a circulator, an isolator and an inductor is produced with a small size and high precision.
JP2006093485 | GLASS CERAMIC SUBSTRATE |
JP6733856 | Coil parts and filter circuits including them |
JP2017199940 | MAGNETIC DEVICE |
MARUSAWA HIROSHI