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Title:
HIGH FREQUENCY ELECTRIC POWER INTRODUCING PASSAGE
Document Type and Number:
Japanese Patent JPH0613197
Kind Code:
A
Abstract:

PURPOSE: To prevent the breakdown of an airtight window by covering the window and the plasma generating part side surface of an excitation line with a corrosion resistant thin film of oxide or nitride.

CONSTITUTION: A coaxial outer tube 3 and a coaxial inner tube 4 of oxgen free copper are installed in a hole of a reaction chamber wall 2. An excitation antenna 5 is installed on the tip of the inner tube 4. A porcelain window 6 supports and keeps the inner tube in an airtight condition. Ag is metalized on the outer periphery 62 and the inner periphery 61, and the outer tube 3 and the inner tube 4 are brazed by means of an eutectic crystal Ag brazing filler metal of Ag and Cu. Microwave electric power is excited by means of a coaxial line. A Cr2O3 thin film 7 is formed densely in a window 6 and on the inner peripheral surface of the outer tube 3 and on the outer peripheral surface of the inner tube 4. In this constitution, corrosion proof treatment can be applied to the window without exerting influence on a manufacturing process.


Inventors:
Sakamoto, Yuichi
Application Number:
JP1992000180370
Publication Date:
January 21, 1994
Filing Date:
June 15, 1992
Export Citation:
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Assignee:
NIPPON KOSHUHA KK
SAKAMOTO YUICHI
International Classes:
C23C14/22; H05H1/46; (IPC1-7): H05H1/46; C23C14/22
Domestic Patent References:
JPH02220433A1990-09-03
JPS6456873A1989-03-03
Attorney, Agent or Firm:
菅 直人 (外1名)