Title:
HIGH-FREQUENCY INTEGRATED CIRCUIT DEVICE
Document Type and Number:
Japanese Patent JP2005311511
Kind Code:
A
Abstract:
To provide a thin-film capacitor, integrated on the same substrate as that of a thin-film bulk acoustic resonator.
A thin-film piezoelectric resonator having a piezoelectric film with an average spontaneous polarization Psr and the thin-film capacitor having an average spontaneous polarization Psc, having a dielectric film made of the same material as that of the piezoelectric film and placed on the same substrate as that of the thin-film piezoelectric resonator satisfy the relation |Psr| > |Psc|.
Inventors:
ABE KAZUHIDE
OHARA RYOICHI
SANO KENYA
KAWAKUBO TAKASHI
OHARA RYOICHI
SANO KENYA
KAWAKUBO TAKASHI
Application Number:
JP2004123027A
Publication Date:
November 04, 2005
Filing Date:
April 19, 2004
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H01G4/33; H01L21/822; H01L27/04; H01L41/09; H01L41/18; H03H9/02; H03H9/17; (IPC1-7): H03H9/17; H01G4/33; H01L21/822; H01L27/04; H01L41/09; H01L41/18; H03H9/02
Attorney, Agent or Firm:
Hiroshi Horiguchi