Title:
HIGH FREQUENCY MICRO-MACHINE SWITCH AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2007141835
Kind Code:
A
Abstract:
To provide a piezoelectric high frequency micro-machine switch in which a cantilever and a CPW wiring line can be formed on one base plate and the above cantilever drives downward.
The high frequency micro-machine switch is composed of a base plate 101 provided with an RG signal line 102a, 102b and a cavity 103a, a cantilever which is positioned on the cavity 103a and one end of which is fixed on the base plate 101 and a connection pad 111 for contacting the signal line and connecting with the RF signal line 102a, 102b when the cantilever 110 drives downward, and the manufacturing method of the above is provided.
Inventors:
KIM JONG-SEOK
KWON SANG-WOOK
KIM DONG KYUN
KIM CHE-HEUNG
LEE SANG HOON
HONG YOUNG-TACK
LEE CHANG-SEUNG
SO INSO
KWON SANG-WOOK
KIM DONG KYUN
KIM CHE-HEUNG
LEE SANG HOON
HONG YOUNG-TACK
LEE CHANG-SEUNG
SO INSO
Application Number:
JP2006298144A
Publication Date:
June 07, 2007
Filing Date:
November 01, 2006
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
H01H57/00; B81B3/00; B81C1/00; H01H49/00
Attorney, Agent or Firm:
Mikio Hatta
Yasuo Nara
Katsuyuki Utani
Ken Fujita
Masanori
Toshihiro Hasegawa
Yasuo Nara
Katsuyuki Utani
Ken Fujita
Masanori
Toshihiro Hasegawa