Title:
高周波電源装置及びその出力制御方法
Document Type and Number:
Japanese Patent JP7291091
Kind Code:
B2
Abstract:
Provided are a high-frequency power supply device and an output control method therefor which are capable of constantly keeping the phase of the outputted high-frequency pulse uniform even in a structure in which the synchronizing pulse and the clock pulse are generated separately. A high-frequency power supply device and an output control method therefor for outputting a high-frequency pulse to a target device on the basis of a synchronizing pulse and a clock pulse, wherein: the period interval of one period of the synchronizing pulse is detected; the phase difference between the synchronizing pulse and the clock pulse during the previous one period is determined; the number of pulses and oscillation frequency of oscillation in the subsequent period is calculated on the basis of the period interval and the phase difference; a clock pulse is generated on the basis of the oscillation frequency signal; and a number of pulses and oscillation frequency for the subsequent period which will cancel the phase difference in the previous one period are determined in a manner such that the phase remains constant after the period interval of the subsequent period elapses when forming a high-frequency pulse on the basis of the period reference signal, the level setting signal, the pulse number signal and the clock pulse.
Inventors:
Takeshi Fujiwara
Hiroyuki Kojima
Satoshi Kawai
Hiroyuki Kojima
Satoshi Kawai
Application Number:
JP2020045559A
Publication Date:
June 14, 2023
Filing Date:
March 16, 2020
Export Citation:
Assignee:
Kyosan Manufacturing Co., Ltd.
International Classes:
H05H1/46; H01L21/3065
Domestic Patent References:
| JP2019091526A |
Foreign References:
| US20170103871 |
Attorney, Agent or Firm:
Aiwa Patent Attorneys Corporation