Title:
HIGH FREQUENCY POWER SUPPLY SOURCE
Document Type and Number:
Japanese Patent JP2015144505
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To enable a high frequency power supply source to stably supply electric power even when the output range of a DC-DC converter becomes narrower than prescribed.SOLUTION: In a high frequency power supply source, an RF power controller 7 controls the output power of a DC-RF converter 4 by controlling the output voltages of a DC-DC converter 3. An RF synthesizer 5 outputs to a load a power Presulting from synthesis of two output powers Pand Pat a prescribed ratio matching a phase difference θ between the two output voltages of the DC-RF converter 4. The RF power controller 7, if the power Pcan be controlled with a PWM signal having a pulse width not smaller than the minimum turned-on duration of a switch element in the DC-DC converter 3, performs a first output control to control the pulse width of the PWM signal with θ being set to 0 or, if not, performs a second output control to control the phase difference θ with the pulse width being fixed to the minimum turned-on duration.
Inventors:
IBUKI YOSHIFUMI
FUKUMOTO YOSHIKI
MORII TATSUYA
OGAMI YASUYUKI
MATSUOKA TAKAHIRO
FUKANO KATSUYUKI
FUKUMOTO YOSHIKI
MORII TATSUYA
OGAMI YASUYUKI
MATSUOKA TAKAHIRO
FUKANO KATSUYUKI
Application Number:
JP2014016498A
Publication Date:
August 06, 2015
Filing Date:
January 31, 2014
Export Citation:
Assignee:
DAIHEN CORP
International Classes:
H02M7/493; H02M7/48; H05H1/46
Domestic Patent References:
| JP2003179029A | 2003-06-27 | |||
| JPH056798A | 1993-01-14 | |||
| JP2012050296A | 2012-03-08 | |||
| JP2014204501A | 2014-10-27 | |||
| JPH07135768A | 1995-05-23 |
Foreign References:
| US6920312B1 | 2005-07-19 |
Attorney, Agent or Firm:
Minoru Yoshida
Tsukasa Senba
Keita Kobuchi
Tsukasa Senba
Keita Kobuchi
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