Title:
高性能検査走査電子顕微鏡装置およびその動作方法
Document Type and Number:
Japanese Patent JP6826637
Kind Code:
B2
Abstract:
A charged particle beam arrangement is described. The charged particle beam arrangement includes a charged particle source including a cold field emitter, a beam limiting aperture between the charged particle source and a magnetic condenser lens; the magnetic condenser lens comprising a first inner pole piece and a first outer pole piece, wherein a first axial distance between the charged particle source and the first inner pole piece is equal or less than approximately 20 mm, an acceleration section for accelerating the charged particle beam to an energy of 10 keV or more, a magnetic objective lens comprising a second inner pole piece and a second outer pole piece, a third axial distance between the second inner pole piece and a surface of a specimen is equal to or less than approximately 20 mm, and a deceleration section.
Inventors:
Pavel Adamets
Application Number:
JP2019128870A
Publication Date:
February 03, 2021
Filing Date:
July 11, 2019
Export Citation:
Assignee:
ICT Integrated Circuit Testing Gesell Shaft Feer Hull Priter Brief Tehnik M B Her
International Classes:
H01J37/141; G21K5/04; H01J1/304; H01J37/06; H01J37/09; H01J37/147; H01J37/20; H01J37/28
Domestic Patent References:
| JP2016143513A |
Foreign References:
| US20160163500 |
Attorney, Agent or Firm:
Shinichiro Tanaka
▲吉▼田 和彦
Hiroyuki Suda
Fumiaki Otsuka
Takaki Nishijima
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu
Kudo Akira
▲吉▼田 和彦
Hiroyuki Suda
Fumiaki Otsuka
Takaki Nishijima
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu
Kudo Akira