Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
HIGH POWER MICROMACHINED SWITCH
Document Type and Number:
Japanese Patent JP2003217423
Kind Code:
A
Abstract:

To provide a MEMS switch capable of being driven under a high power environment.

This MEMS switch is provided with a deflecting beam 130 attached to a substrate 120, an actuator plate 160 attached to the substrate 120, a driven plate 140 attached to the deflecting beam 130, a first signal path plate 150 attached to the substrate 120, a second signal path plate 170 attached to the deflecting beam 130 and a dielectric pad 180 attached to one of the first signal path plate 150 and the second signal path plate 170. The first signal path plate 150 and the second signal path plate 170 are connected to a signal path. When the first signal path plate 150 and the second signal path plate 170 approach to each other by the connection, the signal path is closed, and a solid state switch 300 is in parallel with the MEMS switch 100 and is connected to the signal path.


Inventors:
Wong, Marvin Glenn
Application Number:
JP2002000304590
Publication Date:
July 31, 2003
Filing Date:
October 18, 2002
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
AGILENT TECHNOL INC
International Classes:
B81B3/00; H01H59/00; H01P1/12; H01H9/54; (IPC1-7): H01H59/00; B81B3/00; H01P1/12
Attorney, Agent or Firm:
古谷 馨 (外3名)