Title:
High precision beam arrangement for local domain navigation
Document Type and Number:
Japanese Patent JP6108684
Kind Code:
B2
Abstract:
An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing is described. Preferred embodiments of the present invention can be used to rapidly navigate to one single bit cell in a memory array or similar structure, for example to characterize or correct a defect in that individual bit cell. High-resolution scanning is used to scan a "strip" of cells on the one edge of the array (along either the X axis and the Y axis) to locate a row containing the desired cell followed by a similar high-speed scan along the located row (in the remaining direction) until the desired cell location is reached. This allows pattern-recognition tools to be used to automatically "count" the cells necessary to navigate to the desired cell, without the large expenditure of time required to image the entire array.
More Like This:
Inventors:
Rainier Louis Walshaw
Richard Jay Young
Chad Lou
Peter Dee Carlson
Richard Jay Young
Chad Lou
Peter Dee Carlson
Application Number:
JP2012113991A
Publication Date:
April 05, 2017
Filing Date:
May 18, 2012
Export Citation:
Assignee:
F-I-I Company
International Classes:
G01B15/00; G01B15/04; H01J37/22; H01L21/027; H01L21/66
Domestic Patent References:
| JP2007093458A | ||||
| JP2007294391A | ||||
| JP7201300A | ||||
| JP2003016988A | ||||
| JP2010123354A |
Foreign References:
| US20100092070 |
Attorney, Agent or Firm:
Masahiko Amagai