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Patent Searching and Data


Title:
HIGH PRECISION FLOWRATE MEASUREMENT METHOD AND MEASUREMENT SYSTEM
Document Type and Number:
Japanese Patent JP2005134138
Kind Code:
A
Abstract:

To easily perform calibration of a flowrate meter by measuring in real time, gas flowrate resistive to disturbance without being affected by the air temperature and pressure variation.

The flowrate of gas supplied to a external gas using equipment 9 through a tube 3 from a gas cylinder 2 of a gas supply system 1 is measured with a flowmeter 4, its measurement result is output to an arithmetic unit 5 where, with the use of the measured data and a measurement data of a balance 6, the opening of a valve 8 is adjusted so that a specific flowrate is supplied. The balance 6 measures the total weight of the gas cylinder 2 to obtain weight variation at a specific time interval, which is input to a comparator 7 by obtaining gas mass flow as a quantity of gas consumption from the gas cylinder 2. The flowmeter 4 is calibrated with the accurate flowrate value input from the balance 6 in the arithmetic unit 5 and obtains calibration data of the flowmeter. By statistically processing the flowrate measurement data of the balance 6 and the flowmeter 4, the opening of the valve 8 is controlled.


Inventors:
Kato, Takeshi
Nozaki, Takeshi
Negishi, Akira
Kato, Toru
Amano, Masatsugu
Application Number:
JP2003000367189
Publication Date:
May 26, 2005
Filing Date:
October 28, 2003
Export Citation:
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Assignee:
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY
International Classes:
G01F23/20; G01F1/76; G01F25/00; G01F23/00; G01F1/76; G01F25/00; (IPC1-7): G01F25/00; G01F1/76; G01F23/20