Title:
高精度試験体の角度依存アライメントの検査または校正装置
Document Type and Number:
Japanese Patent JP4417958
Kind Code:
B2
Abstract:
A bearing unit (6) for a measuring part (5) is arranged on one side of the measuring plane (11) or in the measuring plane, and is formed as an air bearing. The measuring part is formed as a C-shaped member with two limbs arranged at right angles to each other. An autocollimator (8) is provided for direction testing. An independent claim is included for a method of testing or calibrating the angular alignment of a device under test.
Inventors:
Rippner, Heinz
Application Number:
JP2006521488A
Publication Date:
February 17, 2010
Filing Date:
July 23, 2004
Export Citation:
Assignee:
Leica Geosystems AG
International Classes:
G01C25/00; G01C1/02; G01C15/00
Domestic Patent References:
| JP926319A | ||||
| JP953938A | ||||
| JP2001235308A |
Foreign References:
| US3874087 |
Attorney, Agent or Firm:
Hajime Tsukuni
Yasuo Yanagibashi
Yasuo Yanagibashi