Title:
高圧洗浄液噴射式洗浄装置
Document Type and Number:
Japanese Patent JP5058100
Kind Code:
B2
Abstract:
A high-pressure washing liquid ejecting washing apparatus comprises a bar-shaped holder; and a plurality of high-pressure washing liquid ejecting nozzles arranged at constant intervals along a longitudinal direction of the bar-shaped holder, the holder being supported at both sides in a longitudinal direction thereof such that the holder is rotatable around its longitudinal axis, the holder being reciprocatingly rotated around the longitudinal axis within a predetermined rotational angle and the ejecting nozzles ejecting a high-pressure washing liquid to a washed surface of an object in a single straight-line shape to wash the object while the object is conveyed at a constant speed with respect to the holder, wherein the holder has a length which is not less than a length across the object and is disposed such that the holder is orthogonal to a direction in which the object is conveyed or is tilted with respect to the direction in which the object is conveyed, when viewed from a normal line direction of the washed surface.
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Inventors:
Aoki Sadaaki
Morimasa Kushita
Kyoji Tsujita
Hideyuki Tanaka
Mitsuru Nomura
Morimasa Kushita
Kyoji Tsujita
Hideyuki Tanaka
Mitsuru Nomura
Application Number:
JP2008213878A
Publication Date:
October 24, 2012
Filing Date:
August 22, 2008
Export Citation:
Assignee:
Kawasaki Heavy Industries, Ltd.
International Classes:
H01L21/304; B05B1/20; G02F1/13; G02F1/1333
Domestic Patent References:
| JP2005238109A | ||||
| JP2002045803A |
Attorney, Agent or Firm:
Minoru Torinosu
Shinichi Nakajima
Shinichi Nakajima