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Title:
基板上の高純度アルミニウムトップコート
Document Type and Number:
Japanese Patent JP6449224
Kind Code:
B2
Abstract:
To manufacture a chamber component for a processing chamber, an aluminum coating is formed on an article comprising impurities, the aluminum coating being substantially free from impurities.

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Inventors:
San Jennifer Wye
Banda Samance
Application Number:
JP2016500560A
Publication Date:
January 09, 2019
Filing Date:
March 03, 2014
Export Citation:
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Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C25D11/04; C23C28/00
Domestic Patent References:
JP2008240024A
JP9010577A
JP1156496A
JP2000178790A
JP2008303442A
JP2008081748A1
Foreign References:
US20100330390
Attorney, Agent or Firm:
Yoshiaki Anzai



 
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