Title:
高純度流体供給システム
Document Type and Number:
Japanese Patent JP4294485
Kind Code:
B2
Abstract:
A fluid delivery system includes a flow control device and a Coriolis mass flowmeter 112 in fluid communication with the flow control device 110. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller 114 provides a control output signal to the flow control device 110, which may comprise a pinch valve 120, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter 112.
Inventors:
Sandy, Wesley E
Dale, The Yosef Sea
Burger, Michael Jei
Paulus, Geary E
Dale, The Yosef Sea
Burger, Michael Jei
Paulus, Geary E
Application Number:
JP2003547883A
Publication Date:
July 15, 2009
Filing Date:
November 25, 2002
Export Citation:
Assignee:
Emerson Electric Company
International Classes:
G01F1/00; G05D7/06; G01F1/84; G01L19/06
Domestic Patent References:
| JP6109503A | ||||
| JP9303609A | ||||
| JP2266191A | ||||
| JP6101774A | ||||
| JP5026709A |
Foreign References:
| EP1255967A1 | ||||
| EP1259782A1 | ||||
| EP0772027A2 | ||||
| EP1046843A2 |
Attorney, Agent or Firm:
Yoshio Kawaguchi
Makoto Ono
Chihiro Watanabe
Kenkyo Kanayama
Katsuma Osaki
Mitsuaki Tsubokura
Makoto Ono
Chihiro Watanabe
Kenkyo Kanayama
Katsuma Osaki
Mitsuaki Tsubokura