Title:
高速ＴＡＧレンズ支援３Ｄ計測及び拡張被写界深度撮像
Document Type and Number:
Japanese Patent JP7319903
Kind Code:
B2
Abstract:
A method is provided for operating a tunable acoustic gradient (TAG) lens imaging system. The method includes: (a) providing a smart lighting pulse control routine/circuit (SLPCRC) that provides a first mode of exposure control corresponding to a points from focus (PFF) mode of the TAG lens imaging system and a second mode of exposure control corresponding to an extended depth of focus (EDOF) mode of the TAG lens imaging system; (b) placing a workpiece in a field of view of the TAG lens imaging system; and (c) periodically modulating a focus position of the TAG lens imaging system without macroscopically adjusting the spacing between elements in the TAG lens imaging system, wherein the focus position is periodically modulated over a plurality of focus positions along a focus axis direction in a focus range including a surface height of the workpiece, at a modulation frequency of at least 30 kHz.
Inventors:
Vahan Senekelimyan
Joseph Andrew Summers
Scott Ellis Hemmings
Mark Lawrence Delaney
Paul Gerrard Gradonic
Joseph Andrew Summers
Scott Ellis Hemmings
Mark Lawrence Delaney
Paul Gerrard Gradonic
Application Number:
JP2019225216A
Publication Date:
August 02, 2023
Filing Date:
December 13, 2019
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B11/24
Domestic Patent References:
| JP2017223650A | ||||
| JP2018084821A | ||||
| JP2015104136A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito