Title:
HIGH SPEED DRYING DEVICE
Document Type and Number:
Japanese Patent JP2003240435
Kind Code:
A
Abstract:
To quickly dry a washed body washed by non-volatile liquid or volatile liquid at a low cost, while avoiding surface oxidation of the washed body.
Residual washing liquid of the washed body is removed up to the extent without allowing air oxidation of the surface of the washed body by the existence of the residual washing liquid. Just after the removing, the washed body is placed in a superdry environment to completely remove the residual washing liquid of the washed body.
Inventors:
Takemori, Toshinori
Mogi, Masaki
Mogi, Masaki
Application Number:
JP2002000040052
Publication Date:
August 27, 2003
Filing Date:
February 18, 2002
Export Citation:
Assignee:
KYOWA KAKO KK
International Classes:
F26B15/00; F26B5/00; F26B5/14; F26B15/12; F26B21/00; H01L21/00; H01L21/304; (IPC1-7): F26B15/00; F26B5/00; H01L21/304
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