Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
HIGH-SPEED PHASE DIFFERENCE MEASURING DEVICE FOR HETERODYNE INTERFEROMETER
Document Type and Number:
Japanese Patent JPH0493665
Kind Code:
A
Abstract:

PURPOSE: To improve the extent of measuring accuracy by using only an area high in linearity, excepting the neighborhood of an apex, where an error is large, of a chopping signal so far used in the conventional phase difference measuring device.

CONSTITUTION: Reference interference light (a) is subjected to square-law detection by a photodiode 1, converted into a current signal, setting it down to a reference signal, while it is converted into a voltage signal by a converter 3, further converting it into a rectangular wave 5, and it is divided by a 1/2 divider 7, thereby synchronizing the signal with rising and falling, then it is divided by each of 1/2 dividers 9, 10, thus two rectangular wave signals shifted 1/4 cycle phase with each other are generated. After removing a DC component, they are set down to two chopping signal shifted as far as a 1/4 period by integrating circuits 13, 14, forming a composite signal 15, and fed to an arithmetic circuit 16. On the basis of the reference signal, a rectangular wave clock signal is formed via a current voltage converter circuit 4 and a comparator 6, and it is inputted into the arithmetic circuit 16, reading a voltage value of the composite signal in synchronization, then it is converted into a digital value, setting it down to a phase difference output, and fed to a DSP 19, through which a fringe internal phase difference is added to a difference of the fringe number counter by an up-down counter 18, calculating the phase difference.


Inventors:
FUJII TORU
KAWAGUCHI RYOICHI
Application Number:
JP20677990A
Publication Date:
March 26, 1992
Filing Date:
August 06, 1990
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NIKON CORP
International Classes:
G01R25/08; G01J9/02; G01S17/36; F02B75/02; (IPC1-7): G01R25/08; G01S17/36
Attorney, Agent or Firm:
Masao Okabe (4 others)