Title:
高速精密位置決め装置
Document Type and Number:
Japanese Patent JP5562789
Kind Code:
B2
Abstract:
A high-speed precision positioning apparatus has a stage supported by a platen. The stage is driven by a plurality of drive motors that are co-planar with the stage and arranged symmetrically around the stage. The drive motors apply drive forces directly to the stage without any mechanical contact to the stage. The drive forces impart planar motion to the stage in at least three degrees of freedom of motion. In the remaining three degrees of freedom the motion is constrained by a plurality of fluid bearings that operate between the stage and the platen. The drive motors are configured as magnets, attached to the stage, moving in a gap formed in-between top and bottom stationary coils. Integral force cancellation is implemented by a force cancellation system that applies cancellation forces to the stage. The cancellation forces, which are co-planar with a center of gravity of the stage and any components that move with the stage, cancel forces generated by planar motion of the stage. Interferometric encoders are used as position detectors.
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Inventors:
Cahill, stephen pee
Bradley Elle, Hunter
Bradley Elle, Hunter
Application Number:
JP2010223837A
Publication Date:
July 30, 2014
Filing Date:
October 01, 2010
Export Citation:
Assignee:
GS Group Corporation
International Classes:
G01B11/00; H01L21/68; G01B21/00; G01S17/06; G05D3/00; G12B5/00; H01L21/027; H02K41/03; H02N15/00
Domestic Patent References:
| JP10055953A | ||||
| JP2307091A | ||||
| JP10149974A |
Attorney, Agent or Firm:
Shinjiro Ono
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto
Yukio Kanegae
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto
Yukio Kanegae