Title:
HIGH SPEED SHUTTER
Document Type and Number:
Japanese Patent JP2963908
Kind Code:
B2
Abstract:
PURPOSE: To provide a high speed shutter capable of preventing adhesion of electrode metal vapor to an illumination object by simply constituting the high speed shutter which is arranged on the way of a hollow pipe path and lets pass and shield for a short time the light travelling to a target point through the hollow pipe path from a light source of plasma generated between electrodes.
CONSTITUTION: The shutter is constituted by arranging a fixed shield plate 7 and a rotary shield plate 8 rotated with a motor 9 both provided with a light passing hole 13 or notches 14, a partition plate 24 which slides and comes into contact with the rotary shield plate 8 in a pressed state and is made unavailable to rotate in the peripheral direction and partition the space in the hollow pipe path 5 into the fixed shield plate 7 side and the illuminating object 11 side, and a wavelength selection means to let only light in a desired time band among the reached light pass to the illuminating object 11. The wavelength selection means is constituted of a rotational reflection mirror 10 or a second rotary shield plate which rotates synchronizing with the rotary shield plate 8.
Inventors:
KAKUDATE YOZO
YOSHIDA MASANORI
FUJIWARA SHUZO
YOKOI HIROYUKI
USUHA SHU
SUGYAMA SHUICHI
TAKAO NOBUYUKI
YOSHIDA MASANORI
FUJIWARA SHUZO
YOKOI HIROYUKI
USUHA SHU
SUGYAMA SHUICHI
TAKAO NOBUYUKI
Application Number:
JP33400893A
Publication Date:
October 18, 1999
Filing Date:
December 28, 1993
Export Citation:
Assignee:
KOGYO GIJUTSU INCHO
FUJI DENKI SOGO KENKYUSHO KK
FUJI DENKI SOGO KENKYUSHO KK
International Classes:
G01N21/01; G21K1/04; H05H1/00; (IPC1-7): G21K1/04
Domestic Patent References:
| JP58119000A |
Attorney, Agent or Firm:
Shoji Shinobe (1 person outside)
Shoji Shinobe
Shoji Shinobe