To provide a high temperature heating furnace for giving high temperature heating treatment under a high vacuum and high temperature atmosphere or a high purity and slight rare gas atmosphere.
The high temperature vacuum heating furnace comprises internally two or more separated tanks which consist internally of a main heating tank 1 and a preliminary heating tank 2. The preliminary heating tank 2 is heated from room temperature up to 800°C for removing mainly gas adsorbed to a sample 6 and gas incorporated in the sample 6. After completing gas removal, the sample 6 is heated up to 800°C-2600°C at a pressure of 10-3 Pa or lower all times and evacuated, and then it is quickly moved to the main heating tank 1 being held under a clean high temperature atmosphere, where high temperature heating treatment is given thereto under a high temperature and high purity atmosphere of an optimum treatment temperature of 800°C-2600°C.
IWASAKI TOMOHIRO
YAMAGUCHI SEIJI
MATSUMOTO HIROYUKI
TAKANO TOSHIYUKI
Makoto Suhara