PURPOSE: To improve the exhaust speed by arranging a low-temperature panel connected to a cooling device on the intake port side of a casing in a vacuum pump applying momentum to molecules of the gas sucked through the intake port and discharging them through an exhaust port via the rotation of blades.

CONSTITUTION: An intake port 11 and an exhaust port 12 are formed on the upper section and the lower side section of a casing 10. A molecular pump M provided with blades 14 rotated by a motor 13 is arranged in this casing 10. Momentum is applied to molecules of the gas sucked into the casing 10, and they are discharged through the exhaust port 12. In this case, a cooling device 15 and a low-temperature panel 16 thermally integrally connected to it are arranged on the upstream side of the blades 14. The cooling device 15 cools the operating gas compressed by a compressor 21 with a radiator 20 then generates the cold by the expansion of the operating gas guided via the forward passage 19a of a heat exchanger 19. Steam and CO2 or the like are condensed and discharged in the low-temperature panel 16.