Title:
HIGHLY ACCURATE POSITION COMPARATOR
Document Type and Number:
Japanese Patent JPH0447222
Kind Code:
A
Abstract:
PURPOSE:To enable measurement and positional comparison in a two-dimensional manner by fixing an optical system for over lapping of gratings, an interference fringe detection means and a measuring point position detecting means on a mobile section. CONSTITUTION:Image of a grating 12X formed by a lighting of a lighting source 16 is projected on the grating 12X itself through a lens 18, a planar mirror 19, a planar mirror 13X, a planar mirror 19 and a lens 18. Here, if an optical element is so arranged to be inclined slightly to the original grating 12X within a plane of a grating 12, the grating 12X interferes with the image thereof to detect moire fringe with a detector 20. Here, a mobile body 15 is moved in a direction X to match a left end of an object 14 to be measured with a graduation of a microscope 22. Starting from this state, moire fringes are counted with the detector 20 to a point P to determine a distance to the point P from the left end of the object 14. The distance in a direction Y is determined likewise. Thus, measurement and positional comparison are accomplished in a two-dimensional manner.
Inventors:
MOROKUMA HAJIME
Application Number:
JP15465990A
Publication Date:
February 17, 1992
Filing Date:
June 13, 1990
Export Citation:
Assignee:
OLYMPUS OPTICAL CO
International Classes:
G01B11/00; G01B11/02; G01D5/38; (IPC1-7): G01B11/02; G01D5/38
Attorney, Agent or Firm:
Taiji Shinohara (1 person outside)
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