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Title:
高性能ターボ分子真空ポンプ
Document Type and Number:
Japanese Patent JP3584305
Kind Code:
B2
Abstract:
For providing increased pumping speed, increased discharge pressure and decreased operating power a turbomolecular vacuum pump comprises a plurality of axial flow vacuum pumping stages, each of said vacuum pumping stages including a rotor (134, 138) and a stator (136, 140) for pumping gas wherein the turbomolecular vacuum pump comprises a means defining a peripheral channel (142, 144) surrounding at least a first stage of said vacuum pumping stages in proximity to an inlet port (132), said peripheral channel including an annular space (146) located radially outwardly of the inclined blades of the first stage rotor (134, 138), the inclined blades of the first stage stator (136, 140) extending into said peripheral channel (142, 144) such that a centrifugal component of gas flow of the gas being pumped is directed through said peripheral channel (142, 144) toward said exhaust port.

Inventors:
Mars Bed Havelanian
Application Number:
JP12825193A
Publication Date:
November 04, 2004
Filing Date:
April 30, 1993
Export Citation:
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Assignee:
Varian, Incorporated
International Classes:
F04D1/06; F04D17/12; F04D17/16; F04D19/04; F04D23/00; F04D29/54; (IPC1-7): F04D19/04; F04D23/00
Domestic Patent References:
JP2163496A
JP2078793A
JP52169109U
JP3182697A
JP52020413A
Attorney, Agent or Firm:
Sumio Takeuchi
Akira Hori