Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
HIGHLY PURE STANDARD PARTICLE FORMER AND HIGHLY PURE STANDARD PARTICLE MADE THEREBY
Document Type and Number:
Japanese Patent JP2002239377
Kind Code:
A
Abstract:

To provide a former that efficiently forms nanometer-size highly pure standard particles having a monodisperse uniform structure and being in the state alleviated in contamination and damage from a material which can be selected from a wide variety of materials and to provide highly pure standard particles.

This former is constituted by using a particle formation chamber 101 that forms highly pure particles by exciting a semiconductor target with pulse laser beams 109 in a low-pressure rare gas atmosphere, thereby subjecting the target to an abrasion reaction for release and injection and condensing and growing the released and injected matter in air, a chamber 102 that classifies the highly pure particles, and a chamber 103 that collects the highly pure standard particles on a substrate.


Inventors:
Suzuki, Nobuyasu
Yoshida, Takehito
Makino, Toshiharu
Yamada, Yuka
Application Number:
JP2001000037736
Publication Date:
August 27, 2002
Filing Date:
February 14, 2001
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
B03C7/02; B01J19/12; B22F9/02; C23C14/00; C23C14/28; G01N15/06; H01L21/203; (IPC1-7): B01J19/12; B03C7/02; B22F9/02; C23C14/00