To provide a highly viscous fluid delivery device capable of supplying highly viscous fluid at a constant flow rate and in higher precision.
The highly viscous fluid delivery device is furnished with an inlet channel 1 connected to a supply source 8 of the highly viscous fluid, a plural number of branch channels 2 branched from the inlet channel 1, fluid delivery mechanisms 4 respectively provided on the branch channels and a discharge channel 3 connected to the side of a device to be supplied with the fluid, mainly. Each of the fluid delivery mechanisms 4 is mounted through a channel change-over means 5 to change connection to an inlet side channel 21 and connection to a discharge side channel 22 of each of the branch channels 2 over to each other. Additionally, each of the fluid delivery mechanisms 4 is furnished with a syringe 41 to intake and discharge the fluid by reciprocating motion and is set free to work in a state phase-shifted to each other.
HINO MASUMI
BANDO YOSHIFUMI
