Title:
HOLDER
Document Type and Number:
Japanese Patent JP2022082558
Kind Code:
A
Abstract:
To propose a holder that satisfies favorable physical properties.SOLUTION: The present invention discloses a holder for a substrate composed of fiber and resin. The holder is a substantially ring-shaped plate having an opening. The substrate is held at a position corresponding to the opening. The plate has a first resin layer. The first resin layer contains fiber. The fiber has its longitudinal side along the circumferential direction of the opening where the substrate is held.SELECTED DRAWING: Figure 1
Inventors:
NISHIHARA YUSAKU
MURATA CHISATO
HASUIKE YUHEI
HIROOKA NOBUKI
MURATA CHISATO
HASUIKE YUHEI
HIROOKA NOBUKI
Application Number:
JP2022033232A
Publication Date:
June 02, 2022
Filing Date:
March 04, 2022
Export Citation:
Assignee:
FUDOW CO LTD
International Classes:
H01L21/301; B24B41/06
Attorney, Agent or Firm:
Maejima Daigo
Junichi Hatakeyama
Utaka Katsumi
Junichi Hatakeyama
Utaka Katsumi
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