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Title:
HOLDING DEVICE FOR OPTICAL COMPONENT IN PROJECTION OPTICAL SYSTEM, OPTICAL ADJUSTMENT METHOD USING THE HOLDING DEVICE, EXPOSURE DEVICE HAVING THE HOLDING DEVICE, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP3884996
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To provide a holding device for an optical component in a simple and small projection optical system by which astigmatism is surely corrected without causing coma aberration at correcting the astigmatism, and to provide an optical adjustment method using the holding device, an exposure device having the holding device, an exposure method, and a device manufacturing method.
SOLUTION: The holding device for the optical component in a projection optical system holds at least two optical components and has a relative angle adjusting means to incline either of two optical components to an optical axis and an inclining quantity adjusting means to integrally incline at least two optical components to the optical axis by the same quantity in a direction reverse to an inclining direction by the relative angle adjusting means separately from the relative angle adjusting means.


Inventors:
小川 正彦
Application Number:
JP2002000174904
Publication Date:
February 21, 2007
Filing Date:
June 14, 2002
Export Citation:
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Assignee:
キヤノン株式会社
International Classes:
G02B7/02; G02B13/00; G03F7/20; H01L21/027; (IPC1-7): G02B7/02; G02B13/00; G03F7/20; H01L21/027
Domestic Patent References:
JP10027743A
JP11121322A
Attorney, Agent or Firm:
長尾 達也