Title:
HOLDING DEVICE
Document Type and Number:
Japanese Patent JP2019125755
Kind Code:
A
Abstract:
To cause a table holding surface to be automatically switched to an area corresponding to a wafer size.SOLUTION: A holding device 3 includes a suction source 39 communicating with a central suction area of a table 30 through a pipe 31; and a valve mechanism 4 connected to an outer peripheral suction area through a pipe 32 to cause the outer peripheral suction area to selectively communicate with the suction source 39. The valve mechanism 4 includes a chamber 41, a chamber 42 communicating with the chamber 41 through a communication port, and means 49 for opening/closing the communication port, and the opening/closing means 49 includes: a chamber 43 formed in the chamber 41, facing a communication port; a lid 44 for changing the volume of the chamber 43 while moving in the direction of approaching/separating to/from the communication port; an elastic member 45 provided with force to move the lid 44 in the direction of approaching the communication port; a shaft 46 connected to the lid 44 to penetrate the communication port; and a valve 47 located in the chamber 42 mounted on a front end of the shaft 46 to open/close the communication port. The chamber 42 is connected to the suction source 39 through the pipe 33, and the chamber 43 is connected to the suction source 39 through a pipe 34, and the pipe 32 communicating with the outer peripheral suction area is connected to the chamber 41.SELECTED DRAWING: Figure 2
Inventors:
YAMANAKA SATOSHI
Application Number:
JP2018007135A
Publication Date:
July 25, 2019
Filing Date:
January 19, 2018
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/683; B23Q3/08; B24B41/06; F16K1/00; H01L21/304
Domestic Patent References:
| JP2015103682A | 2015-06-04 | |||
| JP2007327583A | 2007-12-20 | |||
| JP2003174078A | 2003-06-20 | |||
| JPH09174364A | 1997-07-08 | |||
| JP2015168013A | 2015-09-28 | |||
| JP2008177303A | 2008-07-31 | |||
| JP2014512672A | 2014-05-22 |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office