Title:
保持装置
Document Type and Number:
Japanese Patent JP7108585
Kind Code:
B2
Abstract:
To provide a technique for detecting deformation of a mounting surface of a holding device.SOLUTION: A holding device includes a ceramic portion that is mainly composed of ceramic, is formed in a plate shape, and has a mounting surface on which an object is placed, a metal portion that is mainly composed of a metal, is formed in a plate shape, and is arranged on the side opposite to the mounting surface with respect to the ceramic portion, and a joint portion that is placed between the ceramic portion and the metal portion, and joins the ceramic portion and the metal portion, and the joint portion includes a sheet-like detection portion that detects its own deformation.SELECTED DRAWING: Figure 2
Inventors:
Suzuki Atsushi
Application Number:
JP2019149273A
Publication Date:
July 28, 2022
Filing Date:
August 16, 2019
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
H01L21/683; C23C16/458; G01B7/06; H01L21/205; H01L21/3065; H01L21/31; H01L21/66
Domestic Patent References:
| JP2009158966A | ||||
| JP2018504691A | ||||
| JP11251420A | ||||
| JP6302550A |
Foreign References:
| WO2019065233A1 | ||||
| WO2017038555A1 | ||||
| KR101795707B1 |
Attorney, Agent or Firm:
Junya Tanabe
Mayu Honda
Mayu Honda
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