Title:
HOLDING METHOD, PROCESSING METHOD, AND HOLDING DEVICE
Document Type and Number:
Japanese Patent JP2020069606
Kind Code:
A
Abstract:
To provide a holding method which is advantageous for holding an object to be held without deformation.SOLUTION: A holding method for holding an object to be held by using a fixture includes a first process of arranging the object to be held through an adhesive on a holding surface of the fixture for holding the object to be held, a second process of applying a load on a second surface opposite to a first surface of the object to be held facing to the holding surface of the fixture before curing the adhesive, and a third process of adhering the object to be held on the holding surface by curing the adhesive while applying the load on the second surface of the object to be held.SELECTED DRAWING: Figure 1
Inventors:
INOUE MITSURU
ENDO ATSUO
KIMURA KAZUTAKA
SHIBATA YUGO
ENDO ATSUO
KIMURA KAZUTAKA
SHIBATA YUGO
Application Number:
JP2018205715A
Publication Date:
May 07, 2020
Filing Date:
October 31, 2018
Export Citation:
Assignee:
CANON KK
International Classes:
B24B13/005
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu