Title:
保持シート
Document Type and Number:
Japanese Patent JP5355165
Kind Code:
B2
Inventors:
Toshiya Horiuchi
Ryo Koga
Ryo Koga
Application Number:
JP2009068346A
Publication Date:
November 27, 2013
Filing Date:
March 19, 2009
Export Citation:
Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24B37/30; H01L21/304
Domestic Patent References:
| JP2002066911A | ||||
| JP6023664A | ||||
| JP2001121413A | ||||
| JP8203849A | ||||
| JP2005224888A |
Attorney, Agent or Firm:
Toshiaki Igarashi