Title:
保持テーブルの取り付け検査方法
Document Type and Number:
Japanese Patent JP6784570
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an inspection method allowing attachment condition of a holding table to a base to be simply determined good or bad.SOLUTION: An inspection method for attachment of holding table comprises: a first measurement step for measuring a height distribution associated with a holding surface 3a of a holding table 1; a second measurement step for measuring a height distribution associated with a film upper surface 15a of a film 15 suction-held onto the holding surface 3a of the holding table 1; and a determination step for determining that the holding table 1 is not attached to a base 6 normally when a difference between a measured value measured at the first measurement step and a value obtained by subtracting a known film thickness value of the film 15 from the measured value measured at the second measurement step exceeds an allowable range predetermined in a determination part 12, while determining that the holding table 1 is attached to the base 6 normally when said difference is within said allowable range. Thereby, for example, an inspection to determine normality of a condition of attachment of the holding table 1 to the base 6 can be simply done just after attachment of the holding table 1 to the base 6.SELECTED DRAWING: Figure 2
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Inventors:
Osamu Miura
Application Number:
JP2016214166A
Publication Date:
November 11, 2020
Filing Date:
November 01, 2016
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B41/06; B23Q3/08; H01L21/683
Domestic Patent References:
| JP523941A | ||||
| JP201386187A | ||||
| JP2004306254A | ||||
| JP2000202749A |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office