Title:
HOLDING TABLE MECHANISM AND CUTTING DEVICE EQUIPPED WITH THE SAME
Document Type and Number:
Japanese Patent JP2023031472
Kind Code:
A
Abstract:
To provide a new technique capable of reducing time and labor for removing a sub-table when a holding table is replaced in accordance with a workpiece shape.SOLUTION: A holding table mechanism 2 comprises: a first holding table 21 having a first holding surface 21a on which a circular workpiece is held; a second holding table having a second holding surface on which a rectangular workpiece is held; a table base which is disposed on a base 4, to which one of the first holding table or the second holding table is selectively fixed, and on which the fixed one of the first holding table or the second holding table is rotated about a rotational axis passing through the center of the first or second holding surface; and a first sub-table 31 added to the base and disposed so as to be exposed outside the first holding surface when the first holding table is fixed to the table base. The second holding table has a second sub-table, and the first sub-table is disposed at a position where the first sub-table and the second holding table do not come into contact with each other when the second holding table is rotated about the rotational axis.SELECTED DRAWING: Figure 1
Inventors:
FUKUOKA TAKEOMI
Application Number:
JP2021136974A
Publication Date:
March 09, 2023
Filing Date:
August 25, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B41/06; B23Q3/08; B23Q3/10; B24B27/06; B24B53/00; B24B53/12; H01L21/301
Attorney, Agent or Firm:
Hiroshi Ogami