Title:
HOLDING TABLE
Document Type and Number:
Japanese Patent JP2019123035
Kind Code:
A
Abstract:
To provide a holding table that can hold a plate-like work-piece while preventing an exposed part of a base material having an alignment mark formed therein from being ground.SOLUTION: A holding table 10 according to the invention comprises a resin layer holding part 11 having a holding surface 11a for suctioning/holding resin layers 3 and 4 and outer holding means 12 for holding a base material 2 protruding outward from the resin layers 3 and 4, therefore can hold an exposed part 2c of the base material 2 protruding outward from the resin layers 3 and 4 using the outer holding means 12 at a position at which the part does not contact a grinding grindstone when grinding a plate-like work-piece 1 with the grinding grindstone, and prevent an alignment mark formed in the exposed part 2c from being damaged, for instance.SELECTED DRAWING: Figure 2
Inventors:
MIYAMOTO HIROKI
Application Number:
JP2018004074A
Publication Date:
July 25, 2019
Filing Date:
January 15, 2018
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B41/06; H01L21/683
Domestic Patent References:
| JP2015223666A | 2015-12-14 | |||
| JP2015138808A | 2015-07-30 | |||
| JP2017157749A | 2017-09-07 | |||
| JP2016159412A | 2016-09-05 | |||
| JP2005116842A | 2005-04-28 | |||
| JP2014075405A | 2014-04-24 | |||
| JP2011042003A | 2011-03-03 |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office