Title:
HOLDING TABLE
Document Type and Number:
Japanese Patent JP2023014896
Kind Code:
A
Abstract:
To wash an upper surface of a support plate around a holding table by utilizing cooling water.SOLUTION: A holding table 6 includes: a holding portion 610 for holding a workpiece; a frame body 620 having a recessed portion 621 for accommodating the holding portion 610, and surrounding the holding portion 610; a cooling unit 630 that cools the holding table 6; and a cover 640 surrounding the frame body 620. The cooling unit 630 has: a water channel 631 communicating with a water source, formed inside the frame body 620, and supplying cooling water to the inner part of the frame body 620; and a discharge port 633 formed in one end of the water channel 631 and opening in a side wall 642 of the frame body 620. A cover 640 has the side wall 642 suspended at an angle in an outwardly spreading direction. A predetermined empty space 700 is formed between a lower end of the side wall 642 and a support plate. Cooling water discharged from the discharge port 633 collides with the cover 640, flows along the side wall 642, is supplied to an upper surface 510 of the support plate, and washes the upper surface 510 of the support plate.SELECTED DRAWING: Figure 2
Inventors:
ITO FUMITETSU
Application Number:
JP2021119100A
Publication Date:
January 31, 2023
Filing Date:
July 19, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B41/06; B23Q11/00; B24B55/02; B24B55/06; H01L21/304; H01L21/683
Attorney, Agent or Firm:
Sakai International Patent Office
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