PURPOSE: To obtain the captioned device with good heating efficiency which requires no heater for heating and can be operated by low gas pressure, by a method wherein an auxiliary electrode is installed inside a hollow electrode, magnetron discharge is conducted between the hollow electrode and the auxiliary electrode, and the hollow electrode and the auxiliary electrode shall be of a heating structure.
CONSTITUTION: A switch 16 is closed to an magntic field-generating device 13 which is excited by a power source 17, a switch 18 is closed to the side 1 of an auxiliary electrode 10 to which a power source 19 for a magnetron is connected, and a negative voltage relative to the that of a hollow cathode 2 is applied to the auxiliary electrode 10. Between an orifice plate 5 and a flange-like member, there has been applied an electric field by means of the power source 19 for the magnetron, therefore when gas required for the hollow cathode discharge is supplied, the discharge is generated between the orifice 5 and the flange-like member. At the same time, a switch 2 is closed to the side 2, then the potential of the hollow cathode and that of the auxiliary electrode are forced to be the same. Thus, start of discharge can be facilitated to apply effective heating, furthermore the structure may be well strengthened.
MORIMIYA OSAMU
KAGEYAMA KATSUHIRO
