HOLLOW CATHODE DISCHARGE GUN HAVING EXCELLENT DISCHARGE STABILITY

Title:

HOLLOW CATHODE DISCHARGE GUN HAVING EXCELLENT DISCHARGE STABILITY

Document Type and Number:

Japanese Patent JP2007193950

Kind Code:

A

Abstract:

To provide a hollow cathode discharge gun capable of maintaining discharge for a long time and having the stable discharge maintaining property.

The hollow cathode discharge gun comprises a metal tube including a hollow forming a discharge space, a first opening portion provided on one end and letting gas flow into the hollow and a second opening portion provided on the other end and letting the gas flow out of the hollow; a filament inserted into the metal tube in the longitudinal direction; and at least two electron emission members attached around the filament in the metal tube, generating secondary electrons by heating with the filament and separated from each other with the predetermined space.

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Inventors:

CHOI YOUNG WOOK
KIM JEE HYUN
LEE HONG SIK

Application Number:

JP2006008210A

Publication Date:

August 02, 2007

Filing Date:

January 17, 2006

Export Citation:

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Assignee:

KOREA ELECTOTECHNOLOGY RES INS

International Classes:

H01J37/077; C23C14/32; H01J3/02; H05H1/24

Attorney, Agent or Firm:

Sadayuki Hosoi
Iwasakizaki Koji
Ishiwatari Eibo
Nakamura Masamichi

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