Title:
HOLLOW CATHODE AND ELECTRON-EMITTING MEMBER USED THEREFOR
Document Type and Number:
Japanese Patent JP2018032568
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To generate high-density plasma while suppressing a required quantity of a plasma-generation gas without shortening the life of an electron-emitting member.SOLUTION: A hollow cathode 100 comprises an electron-emitting member 10 arranged to emit electrons when heated. The electron-emitting member 10 has an internal flow path 10L through which a plasma-generation gas flows. Electrons in plasma generated in the internal flow path 10L are drawn out from an opening 10a on a downstream side to a flow of the plasma-generation gas in the internal flow path 10L. The internal flow path 10L includes a throttle part 10 L1 having a cross section smaller than an area of an opening 10b on an upstream side to the flow of the plasma-generation gas.SELECTED DRAWING: Figure 1
Inventors:
HAYAKAWA TARO
Application Number:
JP2016165436A
Publication Date:
March 01, 2018
Filing Date:
August 26, 2016
Export Citation:
Assignee:
NISSIN ION EQUIPMENT CO LTD
International Classes:
H01J37/06; H01J27/02; H01J37/077; H01J37/08; H05H1/24
Attorney, Agent or Firm:
Ryuhei Nishimura
Saito Shindai
Saito Shindai