Title:
HOLLOW CATHODE FOR GENERATING PLASMA
Document Type and Number:
Japanese Patent JP3888649
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a hollow cathode capable of stable discharge for a long time without cracking, peeling and falling in the process of discharge in a cylinder of a material LaB6 which suppresses the release of thermoelectrons to be used in a hollow cathode for generating plasma for melting or evaporating metal by hollow cathode discharge.
SOLUTION: A LaB6 combined material cylinder 41 as an internal layer formed in such a manner that the granules of LaB6 are formed into dispersed phases 48, the fine grains of Ta high m.p. metal for sintering are formed into dispersion media 49, and sintering is executed is inserted into a place obtd. by hollowing out the inner circumferential side of the lower edge part (tip part) of a Ta pipe 36, and its lower edge is covered with a Ta cap 39 provided with an opening 38, which is fixed by welding to form into a hollow cathode 47. In this hollow cathode 47, cracking and peeling are not generated in the material LaB6 which suppresses the release of thermoelectrons even by discharge, and discharge can stably be maintained for a long time.
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Inventors:
Toshiharu Kurauchi
Yukinobu Hibino
Masamichi Matsuura
Yukinobu Hibino
Masamichi Matsuura
Application Number:
JP34245096A
Publication Date:
March 07, 2007
Filing Date:
December 06, 1996
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/32; H05H1/46; (IPC1-7): C23C14/32
Domestic Patent References:
| JP7094072A | ||||
| JP3069991B2 |
Other References:
浦本 上進,イオンプレーテングのための大電流,長寿命陰極の研究,真空,1982年,Vol.25, No.10,第660-670頁
Attorney, Agent or Firm:
Yasuo Iisaka