Title:
HOMOGENIZER
Document Type and Number:
Japanese Patent JP2011109097
Kind Code:
A
Abstract:
To provide a homogenizer in which any risk of being damaged is obviated or mitigated.
A two-stage homogenizer includes a first homogenizer stage and a second homogenizer stage. The first homogenizer stage includes a pair of microlens arrays and associated focusing optics. The second homogenizer stage includes a second pair of microlens arrays and associated focusing optics. The second homogenizer stage is positioned to receive radiation provided from the first homogenizer stage.
Inventors:
CLAESSENS BERT JAN
MARCEL MATHIJS THEODORE MARIE DIERICHS
GODFRIED HERMAN PHILIP
MARCEL MATHIJS THEODORE MARIE DIERICHS
GODFRIED HERMAN PHILIP
Application Number:
JP2010253323A
Publication Date:
June 02, 2011
Filing Date:
November 12, 2010
Export Citation:
Assignee:
ASML NETHERLANDS BV
International Classes:
H01L21/027; G02B3/00; G02B19/00
Domestic Patent References:
| JP2005079449A | 2005-03-24 | |||
| JP2009236819A | 2009-10-15 | |||
| JP2001210586A | 2001-08-03 | |||
| JP2004266259A | 2004-09-24 | |||
| JPH02254710A | 1990-10-15 |
Foreign References:
| WO2009080279A1 | 2009-07-02 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki
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