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Patent Searching and Data


Title:
HOT-CATHODE ELECTRON IMPACT TYPE ION SOURCE
Document Type and Number:
Japanese Patent JPS6084756
Kind Code:
A
Abstract:

PURPOSE: To obtain a hot-cathode electron impact type ion source of high sensitivity which is used for a tetrode analyzer by installing a hot cathode around an anode and by installing doughnut-like electrodes (which constitute an electron diaphragm electrode) over and under the hot cathode.

CONSTITUTION: An annular hot cathode 3 is installed around a cylindrical cage- like anode 1 which has an electron permeable grid-like or mesh-like circumferential area. At the same time, doughnut-like electrode plates 21 and 22 (which constitute an electron diaphragm electrode 2) are installed over and under the cathode 3, thereby constituting a hot-cathode electron impact type ion source for a tetrode analyzer. As a result, it is possible to concentrate thermions discharged from the hot cathode 3 efficiently in the cylindrical cage-like anode 1 without deteriorating the electron diaphragm effect, thereby obtaining an ion source of high sensitivity.


Inventors:
WATANABE FUMIO
KOMAKI SHIYOUJIROU
MIYAMOTO MASAO
ITOU TAKAO
Application Number:
JP19211583A
Publication Date:
May 14, 1985
Filing Date:
October 14, 1983
Export Citation:
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Assignee:
SEIKO INSTR & ELECTRONICS
WATANABE FUMIO
International Classes:
H01J49/14; G01N27/62; G21K1/00; H01J27/02; H01J27/08; (IPC1-7): G01N27/62; G21K1/00; H01J49/14
Attorney, Agent or Firm:
Keinosuke Hayashi