Title:
熱陰極電離真空計
Document Type and Number:
Japanese Patent JP5827532
Kind Code:
B2
Inventors:
Naoki Takahashi
Application Number:
JP2011210914A
Publication Date:
December 02, 2015
Filing Date:
September 27, 2011
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G01L21/32
Domestic Patent References:
| JP46031398B1 | ||||
| JP56011332A |
Foreign References:
| US20060123915 |
Attorney, Agent or Firm:
Seiryu Corporation