Title:
HOT FILM SENSOR
Document Type and Number:
Japanese Patent JP2018084457
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To reduce the thickness of a hot film sensor without sacrificing the accuracy of the hot film sensor.SOLUTION: The hot film sensor includes: an isolation heat-insulating film; and a film-like sensitive part on the isolation heat-insulating film, the isolation heat-insulating film being provided for a measurement object, and the isolation heat-insulating film containing a polyimide resin and hollow particles mixed and dispersed in the polyimide resin.SELECTED DRAWING: Figure 3
Inventors:
MINAGAWA SHINYA
BABA MASARU
INOUE KAORU
BABA MASARU
INOUE KAORU
Application Number:
JP2016226754A
Publication Date:
May 31, 2018
Filing Date:
November 22, 2016
Export Citation:
Assignee:
IHI CORP
International Classes:
G01K17/00
Domestic Patent References:
| JPS5612837U | 1981-02-03 | |||
| JP2013178382A | 2013-09-09 | |||
| JP2007070458A | 2007-03-22 |
Attorney, Agent or Firm:
Mitsuo Teramoto
Masatake Shiga
Hisanori Takahashi
Masatake Shiga
Hisanori Takahashi
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