Title:
MICROPUMP
Document Type and Number:
Japanese Patent JP3130483
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide much displacing rate of a diaphragm and enable bidirectional liquid transfer and thinning when sticking piezoelectric elements to a silicone diaphragm prepared by thin film process on a silicone substrate by fixing it in a cantilever form to one side of the diaphragm.
SOLUTION: A uni-molf type actuator is prepared by forming two valve diaphragms and one pump diaphragm through etching a silicone substrate 1, and applying a piezoelectric element 3 to each idaphragm. The silicone substrate 1 is connected to a glass substrate 2 formed with a flow passage (through-hole). A packing 4 made of polyimide or the like is pressed against the glass substrate by rigidity of the valve diaphragm, so that the valve is closed. In such a case, the piezoelectric element is plurally divided and applied to the valve diaphragm in a cantilever form, for increasing a displacing rate of the diaphragm.
Inventors:
Kazuyoshi Furuta
Jun Shinohara
Jun Shinohara
Application Number:
JP8167297A
Publication Date:
January 31, 2001
Filing Date:
March 31, 1997
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
F04B53/10; B81B3/00; F04B9/00; F04B43/04; (IPC1-7): F04B43/04; F04B9/00; F04B53/10
Domestic Patent References:
| JP2149778A | ||||
| JP5818083U | ||||
| JP5502090A |
Attorney, Agent or Firm:
Keinosuke Hayashi