To provide a housing moving device, etc. for a low pressure processing apparatus by which the high production yield of substrate processing is obtained without stopping operation of the low pressure apparatus when cleaning a housing.

In this device for moving the housing of the low pressure processing apparatus for low pressure processing by covering a base with the housing and housing a substrate inside, a first air actuator, a second air actuator, a supporting body provided between one end side of the first air actuator and one end side of the second air actuator, at least one first sliding member provided to the other end side of the first air actuator, at least one second sliding member provided to the other end side of the second air actuator, and the housing moving device, etc. for the low pressure processing apparatus containing at least one first connecting member which is provided to the supporting body and can be connected to the housing, are employed.

COPYRIGHT: (C)2007,JPO&INPIT