Title:
非球面コリメートミラーの調整方法
Document Type and Number:
Japanese Patent JP4565908
Kind Code:
B2
Inventors:
Yasuo Mori
Susumu Oishi
Ken Kono
Masahiro Yoneya
Daiichiro Koide
Susumu Oishi
Ken Kono
Masahiro Yoneya
Daiichiro Koide
Application Number:
JP2004188239A
Publication Date:
October 20, 2010
Filing Date:
June 25, 2004
Export Citation:
Assignee:
Dai Nippon Kaken Co., Ltd.
International Classes:
G02B7/198; G02B5/10; G03F7/20; H01L21/027
Domestic Patent References:
| JP2000508598A | ||||
| JP2004047994A | ||||
| JP2003302568A | ||||
| JP9304940A | ||||
| JP2002501222A | ||||
| JP2002310612A | ||||
| JP6302504A |
Attorney, Agent or Firm:
Takashi Otsubo