Title:
光学的放射の偏光の状態に対する光学系の影響を近似する方法
Document Type and Number:
Japanese Patent JP5209880
Kind Code:
B2
Abstract:
A method for approximating an influence of an optical system (12) on the state of polarisation of optical radiation is provided. The method comprises the steps of providing incoming optical radiation (24) for the optical system (12) in several incoming states of polarisation, including at least one incoming state having circularly polarised radiation components; directing the incoming optical radiation (24) onto the optical system (12); measuring at least one characteristic, including a phase distribution, of a resulting outgoing optical radiation (26) emerging from the optical system (12) with respect to each of the incoming states of polarisation, and approximating the influence of the optical system (12) on the state of polarisation of optical radiation by evaluating the measured characteristics of the outgoing optical radiation (26).
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Inventors:
Marx Mengel
Michael Toteck
Michael Toteck
Application Number:
JP2007020652A
Publication Date:
June 12, 2013
Filing Date:
January 31, 2007
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G01N21/19; G01J4/04; G01J9/00; H01L21/027
Domestic Patent References:
JP2003287717A | ||||
JP5052657A | ||||
JP2004020343A | ||||
JP2004279380A |
Foreign References:
US20040114150 | ||||
US20050128481 |
Other References:
RAAB,R.E.,“A new method for determining the optical properties of a dielectric”,OPTICA ACTA,1982年 9月,Vol.29, No.9,pp.1243-1253
Attorney, Agent or Firm:
Kenji Sugimura
Tatsuya Sawada
Kazuyuki Tomita
Groundwork Kenichi
Tatsuya Sawada
Kazuyuki Tomita
Groundwork Kenichi