Title:
ポリッシング装置の定盤及び研磨パッド貼着方法
Document Type and Number:
Japanese Patent JP4041577
Kind Code:
B2
Inventors:
Shunji Hakomori
Masafumi Onishi
Masafumi Onishi
Application Number:
JP8491898A
Publication Date:
January 30, 2008
Filing Date:
March 16, 1998
Export Citation:
Assignee:
Speed Fam Co., Ltd.
International Classes:
B24B37/12; B24B37/20; B24B45/00; B24D7/16; B24D18/00
Domestic Patent References:
| JP8174406A | ||||
| JP5049252U | ||||
| JP63062328A | ||||
| JP9085605A | ||||
| JP2143186U | ||||
| JP5253364A | ||||
| JP3297136A |
Attorney, Agent or Firm:
Takakazu Tsukahara